Semiconductor Production Equipment

Semiconductor manufacturing requires exceptionally high standards for process equipment to ensure product purity, yield optimization, and compliance with the strictest cleanliness requirements. Roben Mfg, Inc. specializes in producing custom high-purity pressure vessels and fluid handling systems that meet the exacting needs of the semiconductor industry for its most critical processes.

Our semiconductor production equipment is engineered to exceed the highest industry standards, including ASME, SEMI, and specialized high-purity requirements. These systems provide uncompromising material purity, exceptional surface finishes, and advanced control features necessary for the most sensitive semiconductor manufacturing processes.

Types of Semiconductor Production Equipment

• Ultra-High-Purity (UHP) Process Gas Delivery Systems
• High-Purity Chemical Storage and Delivery Vessels
• Electronic Grade Chemical Distribution Systems
• Specialty Gas Cabinet Integration Equipment
• Wafer Cleaning Chemical Storage Systems
• Etch Chemistry Delivery Equipment
• Precursor Chemical Handling Systems
• Slurry Preparation and Distribution Vessels
• Point-of-Use Chemical Mixing Systems
• High-Purity Water Storage and Distribution
• Gas Abatement System Components
• Solvent Purification and Delivery Systems
• Custom Valve Manifold Boxes (VMBs)
• Sub-Fab Chemical Management Systems
• Specialty Material Delivery Equipment

Key Features

• Advanced Material Selection: 316L stainless steel with specialized finishing or exotic alloys as required
• Electropolished Surfaces: Internal surfaces electropolished to <10 Ra micro-inch finish
• High-Purity Welding: Orbital welding with full penetration and inert gas purging
• Particle-Free Design: Eliminated dead legs and optimized flow paths to prevent particle generation
• Enhanced Cleanliness: Cleaned and packaged to eliminate contamination
• Advanced Sealing Technology: Metal gaskets and specialized sealing materials
• Purge Capability: Integral purge ports and connections for maintaining system purity
• Comprehensive Documentation: Material certificates, cleaning records, and surface finish verification

Applications

• Photolithography Chemical Handling
• Wet Etch Processes
• Chemical Mechanical Planarization (CMP)
• Atomic Layer Deposition (ALD) Precursor Delivery
• Chemical Vapor Deposition (CVD) Processes
• Ion Implantation Gas Systems
• Wafer Cleaning and Preparation
• Photoresist Processing
• Specialized Gas Handling
• Ultrapure Water Systems
• Slurry Management
• Chemical Distribution
• Point-of-Use Blending
• Specialty Materials Delivery
• Process Development Support
• High-Volume Manufacturing
• Research and Development
• Specialty Device Fabrication
• Pilot Production Facilities
• Process Gas Purification

Industries Served

• Semiconductor Manufacturers
• Flat Panel Display Manufacturers
• Photovoltaic Cell Producers
• Microelectromechanical Systems (MEMS) Fabricators
• Specialty Electronic Materials Producers
• Semiconductor Equipment Manufacturers
• Research and Development Facilities
• Specialty Gas Suppliers
• Electronic Grade Chemical Manufacturers
• Semiconductor Foundries
• Advanced Packaging Facilities
• Specialty Device Fabricators
• Semiconductor Research Organizations
• Cleanroom System Integrators
• Specialty Process Development Facilities

Compliance and Standards

Industry Standards

• SEMI Standards for Semiconductor Manufacturing Equipment
• ASME Boiler and Pressure Vessel Code Section VIII
• ASME B31.3 Process Piping Code
• SEMI F20 Specification for 316L Stainless Steel

Material Standards

• ASTM A479/A479M for 316L Stainless Steel Bar
• ASTM A240/A240M for 316L Stainless Steel Plate
• ASTM A270 for Sanitary Tubing
• SEMI F20 Material Specifications

Cleanliness Standards

• SEMI F57 for Polymer Components Used in UHP Semiconductor Service
• SEMI F40 for Determining Nonvolatile Residue in Process Chemicals
• SEMI F43 for Particles on Product Contact Surfaces
• ASTM G93 for Cleaning Methods and Cleanliness Levels

Welding and Surface Standards

• AWS D18.1 Specification for Welding of Austenitic Stainless Steel Tube and Pipe Systems
• SEMI F19 for Surface Characterization of Stainless Steel
• ASME BPE Surface Finish Standards
• SEMI F3 for Procedure for Orbital Tube Welding

Documentation and Validation

• Material Test Reports (MTRs)
• Surface Finish Certification
• Orbital Weld Documentation
• Particulate Testing Results
• Moisture Analysis Reports
• Helium Leak Testing Certification

Quality Assurance

• Complete Material Traceability: Every component tracked from raw material to final assembly
• Enhanced Welding Procedures: Automated orbital welding with 100% documentation
• Expanded Inspection Regime: Comprehensive inspection at every manufacturing stage
• Surface Finish Verification: Documented testing of critical surface parameters
• Cleanliness Verification: Validated cleaning processes with verification testing
• Enhanced Documentation Package: Comprehensive documentation supporting qualification requirements

Custom Design Services

• Process Integration Support: Design for integration with existing fab systems
• Custom Material Selection: Expert guidance on optimal materials for specific chemicals
• Cleanroom Compatibility: Design features that minimize particulate generation
• Space Optimization: Compact designs for valuable fab and sub-fab space
• Point-of-Use Solutions: Specialized systems designed for specific tool requirements
• Facility Integration: Comprehensive planning for system installation

Contact Information

For more information on our semiconductor production equipment or to discuss your specific requirements, please contact our specialized equipment specialists:

Roben Mfg, Inc.
760 Vassar Ave.
Lakewood, NJ 08701
Phone: (732) 364-6000
Email: sales@robenmfg.com
Website: https://robenmfg.com

Request a Consultation with our specialized equipment engineering team to discover how our custom high-purity systems can enhance your semiconductor manufacturing operations.